Process development for a novel low loss and non-PFAS photo imageable dielectric for RF silicon interposer applications

Summary

This paper presents a new non-PFAS (environmentally safer) photo-imageable dielectric material designed for RF silicon interposers. The material offers low dielectric loss, good patternability, and high reliability—important properties for high-frequency communication systems. The authors detail process development, including curing conditions, film quality, and RF performance testing, showing the material's strong potential as a next-generation interposer dielectric.

Figure 6 – Wafer Thickness Distribution & SEM Revealed Cu Pillars

Thickness distribution and SEM images
Fig. 6 (a) Wafer TTV improvement using CMP + etch. (b) Top SEM images of the revealed Cu pillars.

Key Concepts

RF Performance Considerations

The dielectric constant and loss tangent directly impact insertion loss and signal integrity in RF interposers, making careful material selection critical.

Bibliography Citation:

N. Maleki, A. Hussaddi, D. Mozart, T. Olsson, M. Omareen and F. Ahlgren,
"DeltaBin: An Efficient Binary Data Format for Low Power IoT Devices," 2023 International Conference on Computer, Information and Telecommunication Systems (CITS), Genoa, Italy, 2023, pp. 1–5, doi: 10.1109/CITS58301.2023.10188750.

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